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Customer Pain Points
Bacteria cause wafer defectsBacterial contamination directly leads to fatal defects such as pinholes and bridging on the surface of wafers, seriously affecting chip functionality and reliability.
TOC organic pollutionExcessive total organic carbon (TOC) will form an organic pollution layer on the wafer surface, affecting lithography accuracy and etching uniformity.
Loop biofilmThe biofilm formed on the wall of the distribution circuit is a persistent source of pollution, constantly releasing planktonic bacteria and organic matter, which is difficult to eradicate.
Yield lossOnce the yield decreases due to water quality issues, the losses can reach millions or even tens of millions, which is an unbearable burden.
Problem Solving
Dual band UV technologyAdopting a 254nm+185nm dual band ultraviolet sterilizer, it achieves dual effects of sterilization and TOC degradation, with high efficiency in sterilization.
Biofilm controlInhibit bacterial adhesion and reproduction on the pipe wall; Disrupting the metabolic activity of bacteria within the biofilm, gradually disrupting the structure of the biofilm; Combined with periodic thermal disinfection, the effect is more significant.
Zero pollution guaranteePure physical sterilization without adding any chemical agents; High purity quartz tubing ensures UV transmittance; 316L sanitary grade material, with no risk of precipitate contamination.
yield improvementEffective control of microorganisms and TOC indicators in ultrapure water; Reduce wafer defect rate and improve chip manufacturing yield; Stable and reliable water quality assurance to reduce quality risks.
